Empowering your vision

CMUT

CMUTs – capacitive micromachined ultrasonic transducers – are MEMS based structures suitable for signal transmission and reception. Offering a lot of design freedom, high volume manufacturing and high levels of integration at a lower cost CMUT enable breakthrough applications in medical, microscopy, inkjet printing and testing markets among others.

Photonics

Recent developments allow us to shrink complex photonic circuits so they can be made on a chip or other substrate at the sub-millimeter level. With our unique expertise in process development and manufacturing we shorten your photonics development and enable reliably and expertly integrate and scale up your cutting-edge photonic devices to production.

BioMEMS

Developing BioMEMS devices from proof-of-principle to manufacturing at scale requires a profound understanding of how physical and biological components work at the submillimeter level. Using MEMS & thin film technologies like lithography, dry and wet-etching, deposition, etc, we can manufacture a range of bioMEMS devices for microfluidics, microneedles, micropumps, MEAs and more.

Thin film

For over ten years, we have been active in process development and manufacturing of ultra-thin film EUV membranes and windows for a large variety of applications. Working with leading companies in the field 40nm ultra-thin polysilicon-based membranes have been developed and manufactured for EUV membrane applications, featuring transmission rates in the range 80-90% and sizes over 100cm2.

Flex to Rigid

Flex to Rigid (F2R) is a high-precision platform, that includes flexible polymer interconnects with embedded electrical tracks. The extreme flexibility and micron-size precision lets F2R take over, where standard flex foil technology comes to an end. F2R offers a solution for many miniaturization challenges with virtually every 3D shape made possible.

Other

Our technology platform and expertise in micro- and nanotechnologies is very suitable for the manufacturing of various kinds of MEMS devices and sensors, actuators, micro-wave cavity filters, inkjet printheads and many others. Depending on application requirements, many device optimizations are possible with custom process flow.

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