We create a connection between the digital and analog worlds.
Why work with our pure-play MEMS Foundry?
- The flexibility in working together
- Our responsiveness to change requests
- Our ability to provide creative out-of-the-box solutions for the ‘seemingly impossible’ – a capability developed from working with Philips Research for over 40 years
- Manufacturing MEMS devices under ISO 13485 and 9001 ISO 13485 and 9001
- 2650 m state-of-the-art cleanroom of class 100 – 10,000 (ISO class 5-7)
- Flexibility to work with materials ranging from Ag to Zn, including ‘CMOS-forbidden’ materials, alloys, dielectrics and polymers like parylene
- Flexibility to work with Si, III/V, GaAs, glass, quartz, square and round substrates, up to 8
Project phase
With these MEMS Foundry services we cover the design, development and delivery phases of a MEMS project. Starting with your formal ‘go’, we run a phase-gated process development project, with the following three main phases:
Proof of concept
In the early stages we deliver a preliminary MEMS manufacturing process flow. Further steps are taken to determine manufacturability of the MEMS device, followed by the implementation of the MEMS Foundry process flow, functional samples and most likely some iterations. This will get us to a MEMS proof of concept.
Process Development
Your MEMS proof of concept needs to be further developed into a device that is ready for manufacturing with constant quality and yield. So the next step is to develop a MEMS manufacturing process flow. At the MEMS Foundry we develop a process flow ready for manufacturing, and provide you with devices for verification of its functionality and quality.
Manufacturing
In the early stages we deliver a preliminary MEMS manufacturing process flow. Further steps are taken to determine manufacturability of the MEMS device, followed by the implementation of the MEMS Foundry process flow, functional samples and most likely some iterations. This will get us to a MEMS proof of concept.
